Method of preparing silicon and boron oxynitrides
US6180809A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 1997 |
| Grant date | Jan 30, 2001 |
| Priority date | — |
| Expiry date | Feb 28, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G77/56
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A boron and silicon oxynitride obtained by preparing a polyborosiloxane precursor, conducting nitriding pyrolysis of the precursor to obtain an amorphous boron and silicon oxynitride, and optionally conducting additional pyrolysis to obtain a crystallized boron and silicon oxynitride. The polyborosiloxane precursor is prepared by condensation, in the presence of a catalyst, of (2) a polychlorosilane represented by the formula R.sup.3 R.sup.4 SiCl.sub.2 in which the substituents R.sup.3 and R.sup.4 are identical or different and each represents a hydrogen atom, a chlorine atom, a linear or branched alkyl or alkenyl or alkynyl radical having 5 or less carbon atoms, or an aryl or aralkyl radical having 6 to 18 carbon atoms, with (2) an alkyl borate represented by the formula (R.sup.5 O).sub.3 B in which R.sub.5 represents a linear or branched alkyl radical having 1 to 5 carbon atoms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.