Patent · US Expired

Probe card

US6181145A · kind A · utility

41Cited by
6References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 13, 1998
Grant dateJan 30, 2001
Priority date
Expiry dateOct 13, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/0735
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A probe card provides electrical connection between an IC device under test (DUT) and a testing apparatus. The probe card includes: a test chip for transferring a signal between the DUT and the testing apparatus; and a contact bump provided at a position corresponding to a pad of the test chip, wherein the test chip is provided to securely press the contact bump against the DUT, thereby establishing the electrical connection between the DUT and the contact bump.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.