Coating for reducing operating temperatures of chamber components of a coating apparatus
US6181727A · kind A · utility
5Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 1999 |
| Grant date | Jan 30, 2001 |
| Priority date | — |
| Expiry date | Apr 19, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A component for use in a high-temperature environment such as the coating chamber of a PVD apparatus. A reflective coating on the component serves as a barrier to radiant heat transfer to the component by reflecting thermal radiation. The coating comprises at least one pair of reflective layers, each layer being formed of a material that is essentially transparent to electromagnetic wavelengths of between 500 and 3000 nanometers (nm). In addition, the material of the outermost layer of the pair has a higher index of refraction than the material of the other layer of the pair.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.