Patent · US Expired

Micro-valve with capacitor plate position detector

US6182941A · kind A · utility

90Cited by

7References

8Claims

0Family size

Assignee

FESTO AG & CO. · US

Inventors

Hans Scheurenbrand · Mindelheim, DE
Peter Post · Esslingen am Neckar, DE
Herbert Vollmer · Notzingen, DE
Michael Weinmann · Schorndorf, DE

Key dates

Filing date	Oct 26, 1999
Grant date	Feb 6, 2001
Priority date	—
Expiry date	Oct 26, 2019

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T137/8242
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

A micro-valve arrangement whose micro-valve has a housing containing two opposite housing layers, between which a valve chamber is delimited, wherein a valve member is located. A fluid duct extending in one housing layer opens into the valve chamber and is controlled by the valve member. By means of an electrically operated actuator it is possible for the position of the valve member to be predetermined. Furthermore a position detector is present, which on the basis of the measured capacitance of a capacitor renders it possible to find the position of the valve member. This capacitor comprises two capacitor faces which are provided opposite to each other in the direction of motion of the valve member and on one of the housing layers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.