Ink jet recording head and process of manufacturing the ink jet recording head
US6183070A · kind A · utility
6Cited by
6References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 24, 1997 |
| Grant date | Feb 6, 2001 |
| Priority date | — |
| Expiry date | Oct 24, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14387
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An ink jet recording head includes: a piezoelectric body element 20 that is formed on a silicon substrate 10; an ink cavity 15 that is formed at a location of the silicon substrate 10 corresponding to the piezoelectric body element 20; and a jetting port 18 for jetting ink contained in the ink cavity 15. The ink cavity 15 has a beamlike ion implanted layer 19 that is not only interposed between at least a pair of confronting side walls 15a and 15b thereof while coming in contact with desired regions of such side walls 15a and 15b, but also formed so as to be distanced from other side walls 15c and 15d thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.