Method for producing nitrogen trifluoride by gas-solid reaction
US6183713A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 1999 |
| Grant date | Feb 6, 2001 |
| Priority date | — |
| Expiry date | May 20, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B21/0832
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The invention relates to a method for producing nitrogen trifluoride by gas-solid reaction. This method includes the steps of (a) providing a packed-bed-type vessel filled with a particulate solid of an ammonium complex of a metal fluoride; (b) introducing a fluorine-containing gas into the vessel to allow the fluorine-containing gas to flow upwardly through the vessel such that fluorine of the fluorine-containing gas is reacted with the particulate solid in the vessel, thereby to obtain a reaction gas containing nitrogen trifluoride; and (c) separating the nitrogen trifluoride from the reaction gas. A part of the reaction gas flowing out of the vessel may be introduced into the vessel, and thereby circulated through the vessel. The yield of nitrogen trifluoride becomes substantially improved by this method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.