High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
US6184523A · kind A · utility
4Cited by
14References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1998 |
| Grant date | Feb 6, 2001 |
| Priority date | — |
| Expiry date | Jul 14, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/482
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed is a compact, small diameter, high resolution charged particle-energy detecting, retractable cylindrical mirror analyzer system. Multiple sequential stages enable charged particle-energy detection with an improved resolution as compared to that possible where only a single stage is utilized. The relatively small size allows for positioning, via a manipulator of the cylindrical mirror analyzer system, which is attached to a linear motion feedthrough mounted on a conflat flange of a vacuum system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.