Strip detector

US6184562A · kind A · utility

Assignees

• Max-Planck-Gesellschaft · DE
• Josef Kemmer · DE

Inventors

• Josef Kemmer · Oberschleißheim, DE
• Gerhard Lutz · Munich, DE
• Rainer Richter · Munich, DE
• Lothar Struder · Munich, DE
• Ladislav Andricek · Pocking, DE
• Thomas Gebhart · Rosenheim, DE

Key dates

• Filing date: May 3, 1999
• Grant date: Feb 6, 2001
• Expiry date: May 3, 2019

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F30/29

Abstract

A strip detector for detecting ionizing particles and/or radiation, consisting of a silicon substrate which, at least on one substrate surface thereof, provides for n-doped zones spaced from each other as strips and voltage supply regions as well as a p-doped isolation zone between the n-doped zones, and including a first isolator layer as well as metal strips disposed above the n-doped zones, wherein immediately above the first isolated layer there is at least one further isolator layer provided and that at least one of the isolator layers is discontinuous in its projection above the intermediate zone of the two adjacent n-doped zones, and wherein the p-doped isolation zone presents a lateral distribution of concentration of the p-type doping material such that in the zone below the discontinuity of the discontinuous isolator layer, a higher concentration of doping material is present than in the isolation regions immediately adjacent to the n-doped zones.