Carrier matrix for integrated microanalysis systems, method for the production thereof and use of the same
US6187446A · kind A · utility
5Cited by
4References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 4, 1997 |
| Grant date | Feb 13, 2001 |
| Priority date | — |
| Expiry date | Nov 4, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249988
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A silicon-based carrier matrix having a high ratio of surface area to volume is intended for use in integrated microanalysis systems. The carrier matrix comprises at least one layer of microporous silicon on a body of monocrystalline silicon. A method for producing the carrier matrix comprises electrochemical etching of a body of monocrystalline silicon, thereby to form at least one layer of microporous silicon on this body. The use of the carrier matrix for chemical sensors in integrated microanalysis systems, as well as in various sorts of chromatography, is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.