Optical integrated circuit microbench system
US6187515A · kind A · utility
17Cited by
25References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 1998 |
| Grant date | Feb 13, 2001 |
| Priority date | — |
| Expiry date | May 7, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/423
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to an optical integrated circuit microbench system for accurately aligning optical fiber and waveguides to efficiently couple energy between optical devices. This is accomplished by using the anisotropic etch characteristics of III-V semiconductor materials in two orthogonal directions. One etch direction serves to provide a channel for precise fiber-positioning; the other direction, which is orthogonal provides a reflecting surface for directing the optical energy onto optical devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.