Patent · US Expired

Process for producing pressure sensors

US6189205A · kind A · utility

3Cited by

3References

5Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Thomas Molkner · Stuttgart, DE
Martin Mast · Gerlingen, DE
Jörg Wolf · Neuenhaus, DE
Horst Munzel · Darmstadt, DE

Key dates

Filing date	Sep 24, 1999
Grant date	Feb 20, 2001
Priority date	—
Expiry date	Sep 24, 2019

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49099
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for manufacturing pressure sensing elements which have a metal membrane and a resistive thin film arranged thereon, in which a blind opening is introduced into a base element, and the resistive thin film is applied on a side of the base element facing away from the blind opening. Provision is made for a plurality of pressure sensing elements to be manufactured simultaneously in one panel, and after application of the resistive thin film onto the panel, the panel is sectioned to yield the pressure sensing elements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.