Metallizing device for vacuum metallizing

US6189806A · kind A · utility

Assignee

• Leybold Systems GmbH · DE

Inventors

• Gunter Klemm · Nidda, DE
• Hans Neudert · Alzenau, DE
• Wolfgang Achtner · Maintal, DE

Key dates

• Filing date: Sep 23, 1999
• Grant date: Feb 20, 2001
• Expiry date: Sep 23, 2019

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/243
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A metallizing device for vacuum metallizing arrangements is disclosed having a vaporizer (3) heated by an electrical heating rod (8). This vaporizer (3) is connected to a nozzle element (1) in the form of a hollow body. For the purpose of vaporizing a substrate, vapor flows out of the vaporizer (3) into the nozzle element (1) and from there out of a nozzle gap (2) toward the substrate.