Thin films having rock-salt-like structure deposited on amorphous surfaces
US6190752A · kind A · utility
62Cited by
2References
61Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1998 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | Nov 12, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/32
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thin film of material having a rock-salt-like structure is deposited on a smooth amorphous substrate surface by ion beam assisted deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.