Measuring method and apparatus
US6191857A · kind A · utility
1Cited by
4References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 24, 2000 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | Jan 24, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2433
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of measuring selected values of a specimen having at least one edge is performed with an apparatus which positions the specimen in the path of a light beam such that the specimen at least partially interrupts the light beam and the edge borders a shadow cast by the specimen. Further, the apparatus rotates the specimen about a rotary axis through at least one predetermined angle; monitors, by an observing apparatus, a boundary of the shadow cast by the edge; generates, by the observing apparatus, signals representing positions of the boundary; and evaluates the signals for determining the selected values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.