Beam alignment correction element assembly
US6191897A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 1999 |
| Grant date | Feb 20, 2001 |
| Priority date | — |
| Expiry date | Feb 2, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/646
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target includes a correction element housing, and first and second piezo elements. The correction element is fixedly mounted in the housing and moveable therewith. The piezo elements are supported by a member having a first portion and a second portion. The first piezo element is mounted to the first portion of the member and to said housing, and moves the housing in a first direction. The second piezo element is mounted to the second portion of the member and to a base, and moves the housing in a second direction substantially perpendicular to the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.