Mass flow sensor with rupture detection
US6192749A · kind A · utility
4Cited by
6References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 1998 |
| Grant date | Feb 27, 2001 |
| Priority date | — |
| Expiry date | Aug 12, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow sensor having a thin substrate and a resistor element arranged on the thin substrate. The thin substrate is stretched on a fixed substrate. In a stretched area, at which, in response to mechanical loading of the thin substrate, the mechanical stresses concentrate, a resistor element for detecting ruptures is arranged. As a result of a rupture in the stretched area, this rupture-detection resistor is interrupted, and the rupture can be confirmed due to the sudden increase in the resistance of the resistor, caused thereby.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.