Method for bonding semiconductor chip and device therefor
US6193132A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 23, 1998 |
| Grant date | Feb 27, 2001 |
| Priority date | — |
| Expiry date | Nov 23, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/15787
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method of bonding a semiconductor chip, including step of photographing a surface of a semiconductor chip, on which an electrode is formed, and detecting a relative position of the electrode with respect to the semiconductor chip, a bonding step of making the electrode of the semiconductor chip to face a circuit pattern provided on a substrate, and bonding the electrode to the circuit pattern, a step of photographing the substrate on which the semiconductor chip is formed, and detecting a relative position of the semiconductor chip with respect to the substrate. Also included is a step of evaluating a bonding accuracy by calculating a relative position of the electrode with respect to the substrate from the relative position of the semiconductor chip with respect to the substrate and the relative position of the electrode with respect to the semiconductor chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.