Pyrolytic boron nitride container and manufacture thereof
US6197391A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 1997 |
| Grant date | Mar 6, 2001 |
| Priority date | — |
| Expiry date | Nov 17, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
There is disclosed a pyrolytic boron nitride container for accommodating a material serving as a source of molecular beams for molecular beam epitaxy, wherein the transmissivity of the pyrolytic boron nitride container with respect to light having a wave number of 2600 cm.sup.-1 to 6500 cm.sup.-1 has a profile such that the transmissivity changes in the height direction of the container. The pyrolytic boron nitride container can be manufactured through a simple process and at low cost. The pyrolytic boron nitride container can prevent material melt from rising along the inner wall surface and prevent splashed material melt from adhering to the upper portion of the container. Further, the pyrolytic boron nitride container can stabilize molecular beam epitaxial growth and improve the quality of epitaxial film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.