Patent · US Expired

Microwave plasma generator with the short cross-sectional side of the resonator parallel to the chamber axis

US6198224A · kind A · utility

9Cited by

2References

6Claims

0Family size

Assignee

Ralf Spitzl · DE

Inventors

Ralf Spitzl · Troisdorf, DE
Benedikt Aschermann · Wuppertal, DE
Marko Walter · Ober-Ramstadt, DE

Key dates

Filing date	Feb 1, 1999
Grant date	Mar 6, 2001
Priority date	—
Expiry date	Feb 1, 2019

Classification

Technology area (CPC H)Electricity
CPC primaryH05H1/46
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A device for the production of microwave plasmas with a microwave generator 1 and its coupling system to a waveguide resonator 5 which encloses a plasma chamber 7 is proposed, the short side of the cross-section of the resonator 5 lying parallel, facing the z axis, in the common wall with the chamber 7, and the microwave power being coupled from the resonator 5 into the chamber 7 via coupling points 6 in this short cross-sectional side. The coupling points are preferably formed as azimuthal slot couplers in the common wall of 5 and 7. The reference numbers relate to FIG. 1.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.