Process for determining the thickness of a layer of electroconductive material deposited on a body
US6198278A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1999 |
| Grant date | Mar 6, 2001 |
| Priority date | — |
| Expiry date | Apr 30, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/105
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for determining a thickness of a layer of electrically conductive material, any measurement errors are converted into dimensionless norm values with the aid of a normalization process. In this conversion, measurement errors, for example due to temperature drift and different electrical and magnetic properties of the base material of the carrying body can be largely eliminated. These norm values are converted into layer thickness values with the aid of a calibration curve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.