Method and apparatus for localized dynamic mechano-thermal analysis with scanning probe microscopy
US6200022A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 31, 1998 |
| Grant date | Mar 13, 2001 |
| Priority date | — |
| Expiry date | Dec 31, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/881
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for performing localized mechanothermal analysis with scanning probe microscopy ("MASM") is disclosed. In a preferred embodiment an image of the surface or subsurface of a sample is created. A localized region of the sample is selected from the image. Using a scanning microscope, an active or passive thermal probe is positioned at the selected region. A temperature ramp is applied to the localized region. In addition, a dynamic or modulated stress or strain is applied to the localized region. Force data resulting from the applied temperature and stress or strain is collected and processed to produce a graph or fingerprint of the dynamic mechanical and/or calorimetric properties of the selected localized region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.