Hydrogen getters and methods for fabricating sealed microelectronic packages employing same
US6203869A · kind A · utility
Inventors
Key dates
| Filing date | Nov 12, 1996 |
| Grant date | Mar 20, 2001 |
| Priority date | — |
| Expiry date | Nov 12, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31529
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A hydrogen getter comprising a thin film having a layer of inert material, and a hydrogen reactive material disposed in or attached to the layer of inert material. The hydrogen reactive material may comprise palladium oxide powder, and the layer of inert material may comprise an epoxy resin. Various forms of the hydrogen reactive material may be used including porous composite, or a solid composite comprising a powder coated organic thin film, for example. An alternative gettering system that is operative in an oxygen environment uses a thin film of hydrogen reactive material that catalyzes the reaction of hydrogen and oxygen to form water. Improved sealed microelectronic packages are also disclosed along with methods of fabricating same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.