Coaxial resonator microwave plasma generator

US6204603A · kind A · utility

Assignee

• Ralf Spitzl · DE

Inventors

• Ralf Spitzl · Troisdorf, DE
• Benedikt Aschermann · Wuppertal, DE

Key dates

• Filing date: Feb 22, 1999
• Grant date: Mar 20, 2001
• Expiry date: Feb 22, 2019

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/46
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

In a device for the production of powerful microwave plasmas, the resonator is designed as a coaxial resonator with inner and outer conductors. The microwaves are coupled into the plasma chamber via the boundaries of the coaxial resonator.