Method for vacuum fusion bonding
US6205819A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2000 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | Apr 11, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P40/57
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.