Waterborne photoresists made from urethane acrylates
US6207346A · kind A · utility
15Cited by
10References
35Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 8, 1998 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | Apr 8, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/027
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A waterborne photoimageable composition or photoresist comprises a latex binder polymer based on a waterborne dispersion of a photopolymerizable urethane acrylate oligomer having sufficient carboxylic acid functionality to render it develop able in alkaline aqueous solution and a photo initiator chemical system and other components to produce an aqueous coatable and alkali develop able photoresist composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.