Test probe positioning method and system for micro-sized devices
US6208375A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 21, 1999 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | May 21, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06705
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test probe positioning method and system displays an image of a micro-device to be probed on a display screen. A "target feature" is selected--either by manual means such as a computer mouse, or by automatic means based on previously-stored information. The pixel address of the selected target feature within the displayed image is determined. A test probe is introduced into the field of view of the image, and its pixel address determined. With target and probe addresses known, the probe is moved to bring it into contact with the target feature. An individual probe is identified from among a plurality of probes by means of coded markings applied to each. The markings are a known distance apart and a known distance from the probe tip. When placed within the field of view, the identity of each probe, and its location relative to the camera, can be determined by observing its pattern of markings. The test probes are independently movable, so that any individual probe can be identified, located, and moved as necessary to contact a selected target feature. A routing network is used to convey a parameter between a selected test probe and an appropriate piece of test equipment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.