Optical devices having ZNS/CA-MG-fluoride multi-layered mirrors
US6208680A · kind A · utility
14Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 23, 1997 |
| Grant date | Mar 27, 2001 |
| Priority date | — |
| Expiry date | Dec 23, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/18341
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In a multi-layered dielectric mirror the higher refractive index layers comprise ZnS and the lower refractive index layers comprise a composite of approximately 95%MgF.sub.2 and 5%CaF.sub.2 by mole fraction. In one embodiment, the fluoride layers are e-beam deposited from an essentially eutectic melt of the two fluorides. In another embodiment, the semiconductor surface on which the mirror is formed is protected by an aluminum borosilicate glass layer. Application of the invention to the design and fabrication of VCSELs is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.