Patent · US Expired

Pressure sensor membrane having stepped annular peripheral surfaces and pressure sensor employing same

US6209397A · kind A · utility

1Cited by

7References

20Claims

0Family size

Assignee

Wika Alexander Wiegand GmbH & Co. KG · DE

Inventors

Heinz Heller · Regensburg, DE
Kurt Neubeck · Miltenberg, DE
Robert Schwagerl · Klingenberg, DE

Key dates

Filing date	Dec 15, 1997
Grant date	Apr 3, 2001
Priority date	—
Expiry date	Dec 15, 2017

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/0046
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention concerns a membrane for a pressure sensor. The membrane has, on a flat central face (26), an annular attachment face (12), which is disposed concentric to the central face (26), and a non-flat connecting face (54), which links the central face (26) with the edge face (12). The connecting face (54) is formed from at least one annular step (36, 44, 52), which consists of one flat annular face (32, 40, 48) and one truncated-cone-shaped step face (30, 38, 46), which connects radially inward to the annular face. The annular faces (32, 40, 48) and the central face (26) lie in planes parallel to each other, whereby the heights (h1, h2, h3) of the step faces (30, 38, 46) measured perpendicular to the plane of the central face are very small in relationship to the width of the respective step. This stepped design of the membrane results in a high linearity of the characteristic of the membrane pressure sensor and at the same time to a steep slope of the characteristic in its linear region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.