Method for making an electron source with microtips, with self-aligned focusing grid
US6210246A · kind A · utility
2Cited by
5References
5Claims
0Family size
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Key dates
| Filing date | Feb 18, 2000 |
| Grant date | Apr 3, 2001 |
| Priority date | — |
| Expiry date | Feb 18, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2329/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A process for manufacturing a micropoint electron source with an extraction grid and a focusing grid. This process allows for precise alignment of the holes of the extraction grid with the apertures of the focusing grid by using a single photolithography step for making the holes in the extraction grid. Such a process may find particular application for making a micropoint electron source for a flat viewing screen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.