Patent · US Expired

Fixture with at least one trough and method of using the fixture in a plasma or ion beam

US6210546A · kind A · utility

1Cited by
13References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 29, 1998
Grant dateApr 3, 2001
Priority date
Expiry dateOct 29, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/335
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

Optical components, such as optical semi-isolators, are placed in a fixture that exposes at least a portion of the mounting surface of each optical component when a plasma or ion beam is directed at one side of the fixture, while shielding sensitive surfaces of the optical components (e.g., an optical element mounted within the frame of the optical component) from direct exposure to the plasma or ion beam. Exposure to the plasma or ion beam removes contaminants (e.g., metal oxide) that form on the mounting surface during the fabrication of the optical components when the optical element is mounted within its frame using glass solder in a heated oxygenated environment (e.g., air). By removing enough of the contaminants, the plasma or ion beam cleaning step produces optical components that can be reliably mounted onto substrates, such as the ceramic substrates used in encapsulated laser packages, using flux-less auto-bonding techniques.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.