Patent · US Expired

Solid-state image sensor

US6211509A · kind A · utility

48Cited by
2References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 30, 1999
Grant dateApr 3, 2001
Priority date
Expiry dateMar 30, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/026

Abstract

A MOS-type solid-state image sensor has a plurality of pixel units arranged on a p-type Si substrate in a matrix format. Each pixel unit has a photoelectric conversion portion including a photodiode, and a signal extraction portion including an amplification MOS transistor. Each element isolation region for isolating the pixel units from each other has a field oxide film formed on the substrate and a p-type diffusion layer formed in the substrate layer immediately below the oxide film to have a higher carrier impurity concentration than the substrate layer. The bottom portion of each element isolation region is positioned deeper than the bottom portion of a depletion layer extending from the p-n junction of the photodiode to the substrate in an equilibrium state.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.