In-plane MEMS thermal actuator and associated fabrication methods
US6211598A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 1999 |
| Grant date | Apr 3, 2001 |
| Priority date | — |
| Expiry date | Sep 13, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S310/06
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.