Piezoelectric actuator and method for manufacturing same
US6211606A · kind A · utility
5Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 4, 1999 |
| Grant date | Apr 3, 2001 |
| Priority date | — |
| Expiry date | Feb 4, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14387
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Disclosed herein is a piezoelectric actuator comprising a plurality of driving columns separated by grooves in which the width of each driving column in the direction of the groove width widens from the displacement output surface to the substrate. The widening of the diving column width toward the substrate realizes a piezoelectric actuator having a high strength and a high reliability capable of stably and effectively generating an output displacement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.