Semiconductor composite sensor
US6211772A · kind A · utility
36Cited by
11References
6Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 5, 1997 |
| Grant date | Apr 3, 2001 |
| Priority date | — |
| Expiry date | Sep 5, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0054
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor composite sensor using a plurality of semiconductor piezoresistive gauge elements connected in series. The piezoresistive elements are separated so that a high potential terminal of one of the resistive elements having the same resistance values and the substrate of the other of the resistive elements will be connected with equal potential values. Potential difference values between semiconductor regions serving as respective resistive elements and the substrates are made equal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.