Method for controlling preventative maintenance cycles of semiconductor fabricating equipment arranged in a processing line
US6216054A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 4, 1998 |
| Grant date | Apr 10, 2001 |
| Priority date | — |
| Expiry date | Sep 4, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/80
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for controlling preventative maintenance cycles in a semiconductor fabrication system includes automatically receiving, at a preventative maintenance module (PMM) in data communication with a host computer, operating parameter data from equipment in the system. Specification data corresponding to the equipment are retrieved by the PMM from a preventative maintenance cycle data base. It is determined whether the operating parameter data exceeds the specification data at the PMM. If the operating parameter data exceeds the specification data, then a key value of a variable ID corresponding to the equipment is changed, and an operating state of the equipment is modified by inserting the variable ID into an equipment control message and downloading the equipment control message to the equipment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.