Wafer holding hand
US6216883A · kind A · utility
47Cited by
6References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2000 |
| Grant date | Apr 17, 2001 |
| Priority date | — |
| Expiry date | Jan 6, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer holding hand of the present invention is constituted so that two fixed clamps (2) and one movable clamp (6) are provided on a finger (1). The movable clamp (6) is supported by a plate spring (8) via a clamp holder (7), and the plate spring (8) is fixed to the slider (9). The slider (9) is driven by an air cylinder (10). The fixed clamp (2) is hook shaped, and the movable clamp (6) is drum shaped. A wafer W is held at three points by the movable clamp (6) and the two fixed clamps (2), and a force is applied to the movable clamp (6) by the plate spring (8) so as to hold the wafer W.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.