Method of manufacturing nozzle member, and work apparatus
US6218081A · kind A · utility
3Cited by
9References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 6, 1997 |
| Grant date | Apr 17, 2001 |
| Priority date | — |
| Expiry date | Jun 6, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The invention relates to a method of manufacturing a nozzle member, having the step of splitting light from a light source by amplitude splitting to form a plurality of illumination beams, and the step of illuminating a plurality of mask patterns formed on a mask with the corresponding split illumination beams so as to expose a workpiece via the mask patterns, and a work apparatus using the method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.