Ion source
US6218672A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 30, 1998 |
| Grant date | Apr 17, 2001 |
| Priority date | — |
| Expiry date | Sep 30, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/04
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion source including an electron generating chamber and an ionization chamber adjacent the electron generating chamber and having an opening therebetween. The ionization chamber has a gas inlet opening and the electron generating chamber has a outlet. The gas inlet opening, the outlet and the opening between the two chambers are all on a common axis. The electron generating chamber has therein a cathode filament which extends completely around the axis and generates electrons, electrodes for directing the electrons transversely toward the axis and a deflection electrode for deflecting the electron flow along the axis and into the ionization chamber. An accelerator plate is adjacent the outlet and is adapted to attract ions generated in the ionization chamber along the axis and through the outlet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.