Field emission device having interlayer connections
US6218778A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 1998 |
| Grant date | Apr 17, 2001 |
| Priority date | — |
| Expiry date | Oct 1, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J3/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A field emission device capable of permitting a focusing electrode to be arranged around a gate electrode without any restriction. A gate electrode is arranged on an upper surface of an insulating layer of a cathode substrate-side structure and holes are formed through the insulating layer and gate electrode. A conical emitter is arranged in each of the holes. The insulating layer is formed on the upper surface thereof with a focusing electrode so as to surround the gate electrode. The insulating layer is formed on a lower surface thereof with a connection line, a resistive layer and a cathode electrode line. The gate electrode is electrically connected to the connection line through a contact hole and a gate electrode line is electrically connected to the connection line through another contact hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.