Differential wideband vibration
US6220096A · kind A · utility
12Cited by
15References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 1999 |
| Grant date | Apr 24, 2001 |
| Priority date | — |
| Expiry date | Feb 19, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/131
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates to an apparatus for making highly sensitive differential measurements of acceleration. The vibration sensor includes the use of moveable gate field effect transistors to sense the motion of a cantilever beam relative to the motion sensed by a reference structure, it also includes an actuator element formed by a pair of electrodes actuating electrostatically on the beam. A feedback control loop is also included for force balance operation resulting in a very wide dynamic range for the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.