Patent · US Expired

Power-modulated inductively coupled plasma spectrometry

US6222186A · kind A · utility

21Cited by
11References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 25, 1998
Grant dateApr 24, 2001
Priority date
Expiry dateJun 25, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J49/105
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A technique that modulates the power of a inductively coupled plasma (ICP) according to the operative modes of a spectrometer. An analytical apparatus of the present invention contains an inductively coupled plasma generator (ICPG) and a spectrometer. The ICPG generates a plasma for forming ionic and excited molecular species from a sample. The spectrometer analyzes the ionic and excited molecular species formed. The spectrometer operates in an analysis mode wherein the ionic and excited molecular species are identified according to physical characteristics of the species to provide data on the species and further has a washout mode wherein the spectrometer flushes out interfering ions and molecules and provides no significant data on the sample. The controller modulates the ICPG to operate in power cycles, at each cycle the ICPG operates in an analysis period and a stand-by period. By modulating the plasma power, the power consumption and heat dissipation can be reduced. When such a power modulated plasma source is coupled to, for example, a time-of-flight mass spectrometer (TOFMS), high analytical performance can be achieved with simultaneous multi-element detection capability.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.