Cross-coupled capacitors for improved voltage coefficient
US6222221A · kind A · utility
26Cited by
8References
8Claims
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Key dates
| Filing date | Nov 15, 1999 |
| Grant date | Apr 24, 2001 |
| Priority date | — |
| Expiry date | Nov 15, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/212
Abstract
A capacitor having a low voltage coefficient, even though one electrode is a semiconductor and one is a metal, is described. Two parallel plate capacitors are formed side by side and then cross-connected. The bottom plate of one of the capacitors is connected to the top plate of the other capacitor, and vice versa. This arrangement causes the two capacitors to be polarized in opposite directions at all times so that the individual voltage coefficients cancel each other and give the combined structure a value that is about 2 ppm V. A process for manufacturing this capacitor is also described.
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