Piezoelectric actuator having an array of drive columns
US6222303A · kind A · utility
17Cited by
10References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 10, 1999 |
| Grant date | Apr 24, 2001 |
| Priority date | — |
| Expiry date | Feb 10, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N39/00
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric actuator has a base, and an array of drive columns separated by grooves and each having a top surface for outputting a displacement force. Each of the drive columns is formed in a unitary body with an underlying portion of the base by a first block of a plurality of green sheets made of a piezoelectric material and stacked together. The base has additionally a second block of green sheets stacked between adjacent two of the first block at the portion of the base underlying the groove.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.