Chemically inert megasonic transducer system
US6222305A · kind A · utility
17Cited by
23References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2000 |
| Grant date | Apr 24, 2001 |
| Priority date | — |
| Expiry date | Apr 5, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A megasonic cleaning system comprised of a container, a resonator, a piezoelectric crystal and an indium layer for attaching the resonator to the piezoelectric crystal. The container includes a fluid chamber for holding a volume of cleaning solution. The resonator is selected from the group consisting of sapphire, quartz, silicon carbide, silicon nitride and ceramic. The resonator forms the bottom of the container and has an interface surface which abuts the fluid chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.