Apparatus and method for forming thin film of zinc oxide
US6224736A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 22, 1999 |
| Grant date | May 1, 2001 |
| Priority date | — |
| Expiry date | Jan 22, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/548
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention provides an apparatus or a method for forming a thin zinc oxide film on a conductive base member by immersing the conductive base member and a counter electrode in an aqueous solution and supplying a current between the conductive base member and the counter electrode, in which (a) a distance between the counter electrode and the base member is 50 mm or more at an end portion of the counter electrode and is 3 mm to 40 mm at a central portion of the counter electrode, and (b) an end portion of the counter electrode is folded by an angle of -1.degree. to -90.degree. with respect to the conductive base member. Thus the thin zinc oxide film of satisfactory film quality can be formed on the conductive base member for a long time with a satisfactory yield, and inexpensive and stable production of the thin zinc oxide film can be realized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.