Device for exciting a gas by a surface wave plasma and gas treatment apparatus incorporating such a device
US6224836A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 27, 1998 |
| Grant date | May 1, 2001 |
| Priority date | — |
| Expiry date | Apr 27, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Device for exciting a gas comprising a hollow structure forming a waveguide, made of an electrically conductive material, connected to a microwave generator and including a passage for a hollow dielectric tube adapted for flow of the gas to be excited, the hollow structure further including a wave-concentrating region designed to concentrate microwave radiation produced by the generator onto the tube, during operation of the device, for the purpose of producing a surface wave plasma in the gas, at least one electromagnetic screening sleeve made of a conductive material, fastened to the hollow structure and extending along the extension of the passage so as to surround the hollow tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.