Patent · US Expired

Crystal diameter control system

US6226032A · kind A · utility

8Cited by
19References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 10, 1997
Grant dateMay 1, 2001
Priority date
Expiry dateJun 10, 2017

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B15/26
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A system controls the diameter of both a neck region and a full diameter region of a monocrystalline rod being pulled from molten material held in a crucible. The system uses a video camera viewing light reflected from a meniscus around the rod where the rod emerges from a melt surface of the molten material. The video camera has a zoom lens for enlarging an image of the meniscus during growth of the neck of the rod and for reducing an image of the meniscus during growth of a full diameter body of the rod. A computer controlling a pull rate for the neck growth of the rod is rapidly responsive to a count of total camera pixels illuminated by the image of the meniscus during neck growth.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.