Patent · US Expired

Process for manufacturing monolithic multilayer piezoelectric actuator

US6230378A · kind A · utility

24Cited by

2References

5Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Dieter Cramer · Graz, AT
Hans-Martin Hellebrand · Hersbruck, DE
Karl Lubitz · Ottobrunn, DE

Key dates

Filing date	Sep 29, 1998
Grant date	May 15, 2001
Priority date	—
Expiry date	Sep 29, 2018

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/42
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

A monolithic piezoelectric actuator is made of a stoichiometric PZT ceramic (2) with low A-site doping, and electrode layers (1) containing silver and palladium. It exhibits an improved mechanical strength with good piezoelectric properties. The production process leads to optimum grain sizes and optimum piezoelectric properties irrespective of any B-site doping in the ceramic. Multilayer piezoelectric actuators with high application temperatures up to 150.degree. C. can be obtained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.