Process for producing micro-heat exchangers

US6230408A · kind A · utility

Assignee

• Institut für Mikrotechnik Mainz GmbH · DE

Inventors

• Wolfgang Ehrfeld · Karlsruhe, DE
• Lutz Weber · Weil am Rhein, DE
• Thomas Richter · Erlangen, DE
• Frank Michel · Rosbach, DE

Key dates

• Filing date: Sep 3, 1998
• Grant date: May 15, 2001
• Expiry date: Sep 3, 2018

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49366
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

A method for fabrication of micro heat exchangers, which enable an efficient heat transfer between two flowing media. In a first processing step, a plastic layer is structurized by means of photolithography, x-ray deep lithography, or laser ablation. This plastic structure is galvanically molded in a second processing step, preserving the structural properties. The resulting metallic microstructure, which is the inverse of the original structure, is used as a shaping insert to produce the individual layers from which the micro heat exchanger is assembled. The method according to the invention makes it possible to cheaply produce large numbers of micro heat exchangers.