Thin substrate transferring apparatus
US6234738A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 1999 |
| Grant date | May 22, 2001 |
| Priority date | — |
| Expiry date | Apr 8, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a thin substrate transferring apparatus of this invention, the transfer stroke of a hand of a robot is lengthened and the swivel radius is made small resulting in a more compact apparatus. The apparatus has cassettes, housing a substrate, a robot transferring the substrate, and at least one processing unit. The robot has a vertical swivel arm body swiveling in the vertical direction on a machine bed, and a horizontal swivel arm body having two arm sets swiveling in the horizontal direction on a movable machine bed. The vertical swivel arm body has a first arm and a second arm respectively joined rotatable in the vertical direction and a hand is moved substantially in parallel in the vicinity of the cassettes, or the processing unit, and the horizontal swivel arm body has a first link and a second link and the hand is moved into the cassettes, or the processing unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.